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Deep-Ultraviolet Laser Platform

DUV Fiber Lasers

CW single-frequency deep-ultraviolet DUV laser systems based on a frequency-converted fiber-laser technology, available at 257.5, 266.0 and 273.2 nm with output power up to 150 mW for UV spectroscopy, FBG inscription and other specialized DUV applications.

QSYL wavelengths
257.5 · 266.0 · 273.2 nm
257 nm274 nm
257.5
266.0
273.2
Operating mode
CW · Single-frequency
TEM₀₀ output
Linewidth
<200 kHz
FWHM
Output power
Up to 150 mW
20 / 50 / 100 / 150 mW
Beam quality
M² <1.05
Power stability <1%
DUV laser family

Single-Frequency DUV Fiber Lasers for Precision Applications

The Optromix QSYL platform provides a CW, single-frequency TEM₀₀ deep-ultraviolet laser system available at 257.5 nm, 266.0 nm and 273.2 nm.

QSYL combines a single-frequency green fiber laser and an external-cavity frequency-conversion stage using a BBO crystal. The system uses forced-air cooling and can be controlled from a computer via USB using the supplied software.

257.5 · 266.0 · 273.2 nm
Three listed QSYL central wavelengths in the deep-ultraviolet region.
<200 kHz
Single-frequency linewidth specified as FWHM.
Forced Air Cooling
USB Control
Computer control using software supplied with the device.
Available DUV product

QSYL DUV Single-Frequency Fiber Laser System

CW · Single-frequency · TEM₀₀
QSYL

QSYL integrates the electro-optical unit of a single-frequency green fiber laser, an optical unit with an External Cavity Frequency Doubler using a BBO crystal, and an Automatic Frequency Control Unit.

257.5 / 266.0 / 273.2 nm<200 kHzUp to 150 mWM² <1.05Forced AirUSB Control
Available DUV wavelengths

Available DUV Wavelengths

Choose from three central wavelength configurations to match your application requirements.

DUV wavelength
257.5 nm
Deep-UV output below 260 nm.
DUV wavelength
266.0 nm
Deep-UV output for wavelength-specific configuration.
DUV wavelength
273.2 nm
Longer-wavelength deep-UV output.
Platform specifications

DUV Fiber Laser Specifications

Core optical and system parameters for the current QSYL DUV platform.

ParameterQSYL DUV
Operating modeCW, Single-frequency, TEM₀₀
Central wavelength257.5 nm, 266.0 nm, 273.2 nm
Available output power20 mW, 50 mW, 100 mW, 150 mW
Linewidth (FWHM)<200 kHz
Beam quality (M²)<1.05
Power tunability20–100%
Power stability<1%
Electric power consumption<500 W
CoolingForced Air
Frequency conversion

How the DUV Laser System Generates Deep-UV Output

QSYL combines a single-frequency green fiber laser with an External Cavity Frequency Doubler using a BBO crystal to generate deep-ultraviolet output.

The system also includes an Automatic Frequency Control Unit and supports computer control via USB using the supplied software.

Source
Single-Frequency Green Fiber Laser
Electro-optical source stage
→
Frequency conversion
External Cavity + BBO
Frequency-conversion stage
→
Output
Deep-UV QSYL Output
257.5 · 266.0 · 273.2 nm

Automatic Frequency Control: integrated into the QSYL system architecture.

Applications

Applications of DUV Fiber Lasers

QSYL provides single-frequency CW deep-ultraviolet output for precision applications including spectroscopy, lithography, fiber Bragg grating inscription and photomask repair.

UV Spectroscopy
Single-frequency DUV source for ultraviolet spectroscopy systems.
DUV Lithography
CW deep-ultraviolet laser output for specialized lithography applications.
FBG Writing
DUV source for fiber Bragg grating inscription.
Photomasks Repair
Deep-UV laser output for photomask repair processes.